ecoSplit™ - Automatic singulation of sawn
ACI-ecoTec GmbH has revolutionized the handling of
raw wafers with its modular system, the ecoSplit™.
On the 4th and 5th December 2007, ACI-ecoTec GmbH
launched the new generation of this system at the
‘tecDay’ event held in St.Georgen, Black
This unique solution from ACI has realized the automation
of a key processing stage which until now could only
be done manually. Stacks of up to 150 wafers are loaded
into the machine for separation and wafers with sawing
errors are automatically detected and removed allowing
for continous operation of the machine.
During the live presentation of the ecoSplit™
the attendees were able to see for themselves how
gentle the wafers are handled.
With a high throughput of 1200 wafers per hour (per
splitter lane) and with very low breakage rates, the
machine makes a very cost effective investment for
The ecoSplit™ is presently available in 2 Standard
configurations:  ecoSplit™C
for separating of wafers into a carrier for batch
processing, and  ecoSplit™I
for separation of wafers into tracks for inline processes.
Overview of the advandages:
• Automatic separation of sawn raw wafers directly
from the stack
• Separates wafers quickly without causing any
stress to the wafers
• Separating rates: ecoSplit™C - 1200 wafers
/ hr. ecoSplit™I - 2800 wafers / hr.
• Very low breakage rate (< 0.3%)
• Wafer formats: 125mm (5“), 156mm (6“)
und 210mm (8“)
• For use with wafers thicknesses down to 160µm
• Reduced labor costs and higher wafer yields
• Optimised Cost-of-Ownership
For the respective product datasheets please contact
ACI Marketing & Communication at (firstname.lastname@example.org)
Short company profile of ACI-ecoTec GmbH
“Innovative Automation and Process Engineering
for Cost Effective Manufacturing”
Based in St. Georgen in Germany’s Black Forest,
the Company is committed to the principle of innovation
for the benefit of its customers. ACI-ecoTec develops
and manufactures special purpose machinery to customer
specific projects for automated process and production
systems for the electronics, semiconductor, automotive,
pharmaceutical and medical, and photovoltaic industries.
Systems are characterized as modular, standardized
and process-oriented. With a total of 60 Employees
the company has a turn-over of ca. 8 Million Euro.
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